Solicitation
Autonomous Sputtering Tool – Main Chamber
RFQ_2025025165
Department of Energy, Alliance for Energy Innovation, LLC - DOE Contractor. Other Measuring and Controlling Device Manufacturing.
Response deadline
July 3, 2025 at 7:00 PM EDT
Closed 441 days ago. Posted June 24, 2025, first published June 3, 2025. Scheduled to archive July 4, 2025.
Description
As published on SAM.gov.
It is the intent of NREL to award one (1) Purchase Order under this solicitation for a Autonomous Sputtering Tool – Main Chamber as specified in the Technical Specifications – Attachment No. 1. The objective of this purchase is to enable Autonomous Experimentation (AE) synthesis of nitride and oxide materials to support the Minerals to Materials Supply Chain Research Facility (METALLIC), as part of an autonomous semiconductor development facility at NREL.
Amendment 1 - posted 6/24/25: Q&A's.
Publications
Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.
Points of contact
- Lu Lindsayluann.lindsay@nrel.gov
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