# Autonomous Sputtering Tool – Main Chamber

Canonical: https://abierto.us/opportunities/rfq2025025165

- Solicitation number: RFQ_2025025165
- Notice type: Solicitation
- Status: Closed. Deadline was July 3, 2025 at 7:00 PM EDT
- Department: Department of Energy
- Contracting office: Alliance for Energy Innovation, LLC - DOE Contractor (899060)
- NAICS: 334519 Other Measuring and Controlling Device Manufacturing
- Product or service code: AJ15 General Science & Technology R&D Svcs; General Science & Technology; R&D Facilities & Maj Equip
- Place of performance: Golden, Colorado
- County: Jefferson County (FIPS 08059). https://abierto.us/counties/jefferson-county-co-08059
- City: Golden. https://abierto.us/cities/golden-co-0830835
- First posted: June 3, 2025
- Last posted: June 24, 2025
- SAM.gov: https://sam.gov/workspace/contract/opp/e36bbd2814ca4a3d9331d164c0a116cd/view

## Description

It is the intent of NREL to award one (1) Purchase Order under this solicitation for a Autonomous Sputtering Tool – Main Chamber as specified in the Technical Specifications – Attachment No. 1. The objective of this purchase is to enable Autonomous Experimentation (AE) synthesis of nitride and oxide materials to support the Minerals to Materials Supply Chain Research Facility (METALLIC), as part of an autonomous semiconductor development facility at NREL.

Amendment 1 - posted 6/24/25: Q&A's.

## Publications

- June 3, 2025: Solicitation, due July 3, 2025 at 7:00 PM EDT. Notice 60a3b5503d3f4d7885a0cee1b3a3b459. https://sam.gov/workspace/contract/opp/60a3b5503d3f4d7885a0cee1b3a3b459/view
- June 24, 2025: Solicitation, due July 3, 2025 at 7:00 PM EDT. Notice e36bbd2814ca4a3d9331d164c0a116cd. https://sam.gov/workspace/contract/opp/e36bbd2814ca4a3d9331d164c0a116cd/view

## Points of contact

- Lu Lindsay, luann.lindsay@nrel.gov

---
Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/rfq2025025165.