Solicitation
PlasmaPro 100 Fluorine Etcher
RFP334983
Department of Energy, ORNL Ut-Battelle LLC-DOE Contractor. Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables.
Response deadline
December 4, 2024 at 2:00 PM EST
Closed 652 days ago. Posted November 26, 2024. Scheduled to archive December 19, 2024.
Description
As published on SAM.gov.
PlasmaPro 100 Cobra 300 - Fluorine Etcher (Bosch Configuration) Prepare a clear and concise description of the supplies or services that is not unnecessarily restrictive of competition and will allow a prospective offeror to make an informed business judgment as to whether a copy of the solicitation should be requested. The Federal Acquisition Regulation (FAR) has specific recommendations in Part 5. It is recommended that specific clauses should NOT be included in full, just referenced or attached.
The description section does have a character cap (65,535), as it should be brief and include necessary details. Attachments and links can be added as needed for further documentation. See additional details in: "Plasma Silicon Etcher Specification" document attached.
Publications
Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.
November 26, 2024
Solicitation
Due December 4, 2024 at 2:00 PM EST. SAM.gov, notice b970cdf4bf534f9f81b4ca00c05c506d
Points of contact
- Tina Moodymoodyt@ornl.gov8652415386
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