# PlasmaPro 100 Fluorine Etcher

Canonical: https://abierto.us/opportunities/rfp334983

- Solicitation number: RFP334983
- Notice type: Solicitation
- Status: Closed. Deadline was December 4, 2024 at 2:00 PM EST
- Department: Department of Energy
- Contracting office: ORNL Ut-Battelle LLC-DOE Contractor (899042)
- NAICS: 334513 Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
- Product or service code: 5999 Miscellaneous Electrical and Electronic Components
- Place of performance: Oak Ridge, Tennessee
- County: Anderson County (FIPS 47001). https://abierto.us/counties/anderson-county-tn-47001
- City: Oak Ridge. https://abierto.us/cities/oak-ridge-tn-4755120
- First posted: November 26, 2024
- Last posted: November 26, 2024
- SAM.gov: https://sam.gov/workspace/contract/opp/b970cdf4bf534f9f81b4ca00c05c506d/view

## Description

PlasmaPro 100 Cobra 300 - Fluorine Etcher (Bosch Configuration) Prepare a clear and concise description of the supplies or services that is not unnecessarily restrictive of competition and will allow a prospective offeror to make an informed business judgment as to whether a copy of the solicitation should be requested. The Federal Acquisition Regulation (FAR) has specific recommendations in Part 5. It is recommended that specific clauses should NOT be included in full, just referenced or attached.

The description section does have a character cap (65,535), as it should be brief and include necessary details. Attachments and links can be added as needed for further documentation. See additional details in: "Plasma Silicon Etcher Specification" document attached.

## Publications

- November 26, 2024: Solicitation, due December 4, 2024 at 2:00 PM EST. Notice b970cdf4bf534f9f81b4ca00c05c506d. https://sam.gov/workspace/contract/opp/b970cdf4bf534f9f81b4ca00c05c506d/view

## Points of contact

- Tina Moody, moodyt@ornl.gov, 8652415386

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/rfp334983.