Combined synopsis and solicitation, total small business set-aside
Atomic Layer Deposition (ALD) Reactor System
N00173-26-Q-TB02
Department of the Navy, Naval Research Laboratory. Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables.
Response deadline
September 14, 2026 at 5:00 PM EDT
Closed 48 days ago. Posted September 1, 2026. Scheduled to archive September 29, 2026.
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This one closed 48 days ago
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Description
As published on SAM.gov.
COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS
This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued.
Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes.
This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov.
The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9.
See solicitation attachment, below.
Attachments
Files listed on SAM.gov. The ones we hold a copy of download from here; the rest open SAM's download, which needs no account.
- ALD Specifications.pdf705 KB, September 1, 2026
Publications
Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.
September 1, 2026
Combined synopsis and solicitation, originally sources sought
Due September 14, 2026 at 5:00 PM EDT. SAM.gov, notice 4755ded2002248cd957542372891d581
2 revisions on SAM
- September 1, 2026: publish, combined synopsis and solicitation
- June 9, 2026: publish, sources sought
Points of contact
- TALISA BOYDTALISA.M.BOYD.CIV@US.NAVY.MIL
- Jamie Dixonjamie.l.dixon8.civ@us.navy.mil