# Atomic Layer Deposition (ALD) Reactor System

Canonical: https://abierto.us/opportunities/n0017326qtb02

- Solicitation number: N00173-26-Q-TB02
- Notice type: Combined synopsis and solicitation
- Status: Closed. Deadline was September 14, 2026 at 5:00 PM EDT
- Department: Department of the Navy
- Agency: Department of the Navy
- Contracting office: Naval Research Laboratory (N00173)
- NAICS: 334513 Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
- Product or service code: 6640 Laboratory Equipment and Supplies
- Set-aside: Total small business set-aside
- Place of performance: Washington, District of Columbia
- First posted: September 1, 2026
- Last posted: September 1, 2026
- SAM.gov: https://sam.gov/workspace/contract/opp/4755ded2002248cd957542372891d581/view

## Description

COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued.

Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes. This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference.

The full text of provisions and clauses may be accessed electronically at www.acquisition.gov. The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9. See solicitation attachment, below.

## Publications

- September 1, 2026: Combined synopsis and solicitation, due September 14, 2026 at 5:00 PM EDT. Notice 4755ded2002248cd957542372891d581. https://sam.gov/workspace/contract/opp/4755ded2002248cd957542372891d581/view

## Points of contact

- TALISA BOYD, TALISA.M.BOYD.CIV@US.NAVY.MIL
- Jamie Dixon, jamie.l.dixon8.civ@us.navy.mil

---
Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/n0017326qtb02.