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Award notice

Inductively Coupled Plasma Deep Reactive Ion Etch

N0017325P0063

Department of the Navy, Naval Research Laboratory. Semiconductor Machinery Manufacturing.

View on SAM.govMarkdown

Awarded

Oxford Instruments America, Inc.

$687,895.85 on the award notice, September 25, 2025, contract N0017325P0063

Description

As published on SAM.gov.

The awarded contract is a non-competitive, firm-fixed price award to the awardee specified.

The contract, on USAspending

Federal procurement data the awarding office reported to FPDS, matched to this solicitation by its number.

Recipient
Oxford Instruments America, Inc.
UEI
QK66A86PKE67
CAGE
1EPT2
Vendor location
Concord, MA
Contract
N0017325P0063, purchase order
Obligated
$687,895.85
Actions
2 between September 25, 2025 and December 15, 2025
Competition
Not Competed Under SAP, 1 offer received
Set-aside reported
No Set Aside Used.
Described as
To Procure the Inductively Coupled Plasma (Icp) Deep Reactive Ion Etching (Drie) Tool to Include All of the Required Specifications Found in Attachment 1.
Match
award number N0017325P0063 equals the contract number; same awarding office N00173 (high confidence)
Record
USAspending award page

Publications

Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.

  1. September 26, 2025

    Award notice

    Awarded to OXFORD INSTRUMENTS AMERICA, Inc. Concord for $687,896. SAM.gov, notice a89e29a6fc224ef983302d7cac5c450b

Points of contact

Also open from this buyer