Award notice
Inductively Coupled Plasma Deep Reactive Ion Etch
N0017325P0063
Department of the Navy, Naval Research Laboratory. Semiconductor Machinery Manufacturing.
Awarded
Oxford Instruments America, Inc.
$687,895.85 on the award notice, September 25, 2025, contract N0017325P0063
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Description
As published on SAM.gov.
The awarded contract is a non-competitive, firm-fixed price award to the awardee specified.
The contract, on USAspending
Federal procurement data the awarding office reported to FPDS, matched to this solicitation by its number.
- Recipient
- Oxford Instruments America, Inc.
- UEI
- QK66A86PKE67
- CAGE
- 1EPT2
- Vendor location
- Concord, MA
- Contract
- N0017325P0063, purchase order
- Obligated
- $687,895.85
- Actions
- 2 between September 25, 2025 and December 15, 2025
- Competition
- Not Competed Under SAP, 1 offer received
- Set-aside reported
- No Set Aside Used.
- Described as
- To Procure the Inductively Coupled Plasma (Icp) Deep Reactive Ion Etching (Drie) Tool to Include All of the Required Specifications Found in Attachment 1.
- Match
- award number N0017325P0063 equals the contract number; same awarding office N00173 (high confidence)
- Record
- USAspending award page
Publications
Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.
September 26, 2025
Award notice
Awarded to Oxford Instruments America, Inc. for $687,896. SAM.gov, notice a89e29a6fc224ef983302d7cac5c450b
1 revisions on SAM
- September 26, 2025: publish, award notice
Points of contact
- Tamara Jenkinstamara.n.jenkins.civ@us.navy.mil