# Inductively Coupled Plasma Deep Reactive Ion Etch

Canonical: https://abierto.us/opportunities/n0017325p0063

- Solicitation number: N0017325P0063
- Notice type: Award notice
- Status: Awarded to Oxford Instruments America, Inc. for $687,895.85
- Department: Department of the Navy
- Agency: Department of the Navy
- Contracting office: Naval Research Laboratory (N00173)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 3670 Specialized Semiconductor, Microcircuit, and Printed Circuit Board Manufacturing Machinery
- County: Middlesex County (FIPS 25017). https://abierto.us/counties/middlesex-county-ma-25017
- City: Concord. https://abierto.us/cities/concord-ma-2501715060
- First posted: September 26, 2025
- Last posted: September 26, 2025
- SAM.gov: https://sam.gov/workspace/contract/opp/a89e29a6fc224ef983302d7cac5c450b/view

## Description

The awarded contract is a non-competitive, firm-fixed price award to the awardee specified.

## Award on USAspending

- Recipient: Oxford Instruments America, Inc. (UEI QK66A86PKE67)
- Contract: N0017325P0063, purchase order
- Obligated: $687,895.85
- Competition: Not Competed Under SAP, 1 offers received
- Link: award number N0017325P0063 equals the contract number; same awarding office N00173 (high confidence)
- Record: https://www.usaspending.gov/award/CONT_AWD_N0017325P0063_9700_-NONE-_-NONE-/


## Publications

- September 26, 2025: Award notice. Notice a89e29a6fc224ef983302d7cac5c450b. https://sam.gov/workspace/contract/opp/a89e29a6fc224ef983302d7cac5c450b/view

## Points of contact

- Tamara Jenkins, tamara.n.jenkins.civ@us.navy.mil

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Source: SAM.gov Contract Opportunities bulk extract and USAspending.gov award data. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/n0017325p0063.