Atomic Layer Deposition (ALD) Batch Reactor

AMENDMENT 1: The purpose of this amendment is to provide a list of timely submitted vendor questions along with the Government's responses. Please see below:

1. Question: Please identify the facility interfaces available for the existing dry vacuum pump, pump exhaust, ozone destruct system and vented precursor cabinet, including applicable connection types and their approximate distance from the intended tool location. Please also identify whether chilled water or any utility not listed in the Statement of Requirements will be available or required. 

Response: To clarify, as the requirements indicate, only a vacuum pump is provided by NIST. The inlet is NW40 and the pump outlet is either NW25 or NW40 depending upon the pump used. If the tool pump port is smaller than NW40, NIST can use a reducer to use one of its existing pumps. Ozone destruct and vented precursor cabinet are the contractor's responsibility and can have any external duct connection that is suitable for interfacing with common flexible duct hoses. We typically use hoses with inner diameters of 2.5" or 3.0" to connect to house exhaust. The distances between utilities and the tool location are on the order of 36". NIST will run gas and exhaust lines from the tool to the utility connection points. Per the requirements, utility requirements should be limited to power, compressed air, and carrier gas. Chilled water is not readily available.

2. Question: Please clarify the required delivery handoff point. Does FOB Destination delivery end at NIST Shipping and Receiving, or must the contractor also provide uncrating, rigging, cleanroom wipe-down, and final placement?

Response: FOB destination at NIST shipping and receiving is sufficient.

3. Question: Please confirm whether NIST or the contractor is responsible for furnishing the ALD and SAM precursors required for commissioning and acceptance testing. If the contractor is responsible, please identify the required chemicals, quantities and purity grades.

Response: NIST will furnish the precursors required for commissioning and acceptance testing.

4. Question: Please confirm whether NIST will perform the listed acceptance tests and associated metrology using Government personnel and equipment, or whether the contractor must provide OEM personnel, process qualification, metrology and a separate qualification data package. If contractor or OEM support is required, please identify the expected on-site scope, required deliverables and acceptance criteria.

Response: NIST will perform acceptance tests and metrology using government personnel and equipment.

5. Question: The solicitation requires a warranty but does not specify its duration or service requirements. Please confirm the minimum warranty period, warranty start date and whether on-site warranty service or a specific response time is required.

Response: Warranty period is specified in the requirements document as a minimum of one year after acceptance.

6. Question: The system is identified as an ALD batch reactor, but the solicitation does not specify a minimum batch capacity. Would a system capable of processing a single 200 mm wafer, as well as smaller substrate pieces, satisfy this requirement, or must the system accommodate multiple wafers simultaneously? If multiple-wafer processing is required or preferred, please identify the minimum desired batch capacity.

Response: Yes, a system capable of processing a single 200 mm wafer and smaller pieces would satisfy requirements.

7. Question: The technical specifications require five single-port precursor sources, including one source valve dedicated to ozone, as well as four independently heated 50 mL precursor cylinders. Please confirm whether the system must support all four precursor cylinders and the dedicated ozone source simultaneously without reconfiguring or exchanging source connections.

Response: The system must support all four precursor sources and ozone simultaneously.

8. Question: The solicitation states that the system must be end-user installable, with assembly limited to connecting the compressed-air supply, nitrogen supply, electrical power and reactant sources. Please confirm that NIST will provide the required facility utilities at or immediately adjacent to the intended tool location and that the contractor is not responsible for extending, rerouting or orbitally welding facility gas lines. 

Response: NIST will provide facility utilities close to the intended tool location and NIST will make the connections to the tool. Contractor is not responsible for welding or making the external connections.

** Due date for quote submission has not changed. All quotes must be received no later than 9:00AM EST on 9/1/2026.**

END OF AMENDMENT 1. 

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Please see attached Form SF1449.