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Special notice

Notice of Intent to Sole Source – Deep Reactive Ion Etch (ICP-DRIE) Tool

N00173-25-SSN-TJ01

Department of the Navy, Naval Research Laboratory. Semiconductor Machinery Manufacturing.

Response deadline

July 8, 2025 at 4:00 PM EDT

Closed 436 days ago. Posted June 24, 2025. Scheduled to archive July 23, 2025.

Description

As published on SAM.gov.

This Notice of Intent is not a request for competitive proposals. This is not a solicitation or request for offers. No solicitation package is available and telephone requests will not be honored. Only one responsible source and no other supplies or services will satisfy agency requirements.

The U.S. Department of Navy, Naval Research Laboratory (NRL) Contracting Division intends to enter into a sole source firm fixed price contract with Oxford Instruments America, Inc. in accordance with FAR 13.501(a) and 41 USC 1901 for the procurement of an Inductively Coupled Plasma - Deep Reactive Ion Etch (ICP - DRIE) tool using fluorine chemistries optimized for Bosch etch from Oxford Instruments. This tool was deemed available from the original source, Oxford Instruments.

This notice is being posted to meet the requirements of FAR Subpart 5.2 and DFARS 206.302-1. A solicitation will not be posted; however, any firm that believes it can meet this requirement may give written notification to the Contract Specialist within 15 days of publication of this announcement. Supporting evidence must be in sufficient detail to demonstrate the ability to provide comparable items and developmental experience.

All responsible sources may submit a capability statement, proposal, or quotation, which shall be considered. However, a determination by the Government to compete the proposed procurement based on the responses to this notice is solely within the discretion of the Government.

Publications

Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.

  1. June 24, 2025

    Special notice

    Due July 8, 2025 at 4:00 PM EDT. SAM.gov, notice b35fbd9b5c7f45af9b2073213b9a6aff

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