# Notice of Intent to Sole Source – Deep Reactive Ion Etch (ICP-DRIE) Tool

Canonical: https://abierto.us/opportunities/n0017325ssntj01

- Solicitation number: N00173-25-SSN-TJ01
- Notice type: Special notice
- Status: Closed. Deadline was July 8, 2025 at 4:00 PM EDT
- Department: Department of the Navy
- Agency: Department of the Navy
- Contracting office: Naval Research Laboratory (N00173)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 3670 Specialized Semiconductor, Microcircuit, and Printed Circuit Board Manufacturing Machinery
- First posted: June 24, 2025
- Last posted: June 24, 2025
- SAM.gov: https://sam.gov/workspace/contract/opp/b35fbd9b5c7f45af9b2073213b9a6aff/view

## Description

This Notice of Intent is not a request for competitive proposals. This is not a solicitation or request for offers. No solicitation package is available and telephone requests will not be honored. Only one responsible source and no other supplies or services will satisfy agency requirements.

The U.S. Department of Navy, Naval Research Laboratory (NRL) Contracting Division intends to enter into a sole source firm fixed price contract with Oxford Instruments America, Inc. in accordance with FAR 13.501(a) and 41 USC 1901 for the procurement of an Inductively Coupled Plasma - Deep Reactive Ion Etch (ICP - DRIE) tool using fluorine chemistries optimized for Bosch etch from Oxford Instruments. This tool was deemed available from the original source, Oxford Instruments.

This notice is being posted to meet the requirements of FAR Subpart 5.2 and DFARS 206.302-1. A solicitation will not be posted; however, any firm that believes it can meet this requirement may give written notification to the Contract Specialist within 15 days of publication of this announcement. Supporting evidence must be in sufficient detail to demonstrate the ability to provide comparable items and developmental experience.

All responsible sources may submit a capability statement, proposal, or quotation, which shall be considered. However, a determination by the Government to compete the proposed procurement based on the responses to this notice is solely within the discretion of the Government.

## Publications

- June 24, 2025: Special notice, due July 8, 2025 at 4:00 PM EDT. Notice b35fbd9b5c7f45af9b2073213b9a6aff. https://sam.gov/workspace/contract/opp/b35fbd9b5c7f45af9b2073213b9a6aff/view

## Points of contact

- Tamara Jenkins, tamara.jenkins@nrl.navy.mil, 2029231516

---
Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/n0017325ssntj01.