Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE)

The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide an Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE). The LBNL Molecular Foundry is a national user facility dedicated to nanoscience research.

Its primary focus is to provide researchers from around the world, including those from academia, industry, and other government labs, with free access to state-of-the-art instruments, expertise, and capabilities in this field. A new ICP etcher with ALE capabilities is required to replace LBNL’s existing tool, ensuring support for current projects and expanding research into quantum computing, sensing, and nanofabrication.