# Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE)

Canonical: https://abierto.us/opportunities/kt202501

- Solicitation number: KT-2025-01
- Notice type: Sources sought
- Status: Closed. Deadline was August 22, 2025 at 5:00 PM EDT
- Department: Department of Energy
- Contracting office: Berkeley Natl Lab - DOE Contractor (899032)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 3693 Industrial Assembly Machines
- Place of performance: Berkeley, California
- County: Alameda County (FIPS 06001). https://abierto.us/counties/alameda-county-ca-06001
- City: Berkeley. https://abierto.us/cities/berkeley-ca-0606000
- First posted: August 13, 2025
- Last posted: August 13, 2025
- SAM.gov: https://sam.gov/workspace/contract/opp/01fff77ce06848708cea4bb60d44a6ec/view

## Description

The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide an Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE). The LBNL Molecular Foundry is a national user facility dedicated to nanoscience research.

Its primary focus is to provide researchers from around the world, including those from academia, industry, and other government labs, with free access to state-of-the-art instruments, expertise, and capabilities in this field. A new ICP etcher with ALE capabilities is required to replace LBNL’s existing tool, ensuring support for current projects and expanding research into quantum computing, sensing, and nanofabrication.

## Publications

- August 13, 2025: Sources sought, due August 22, 2025 at 5:00 PM EDT. Notice 01fff77ce06848708cea4bb60d44a6ec. https://sam.gov/workspace/contract/opp/01fff77ce06848708cea4bb60d44a6ec/view

## Points of contact

- Karen Tays, kktays@lbl.gov, 5104864926

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/kt202501.