Inductively Coupled Etching System

Argonne National Laboratory is seeking quotations for an Inductively Coupled Etching System in accordance with the Statement of Work titled “Q-NEXT Inductively Coupled Etching System,” dated April 27, 2026. Award will be made on a Lowest Price, Technically Acceptable (LPTA) basis. Vendors must provide sufficient documentation to demonstrate that their proposed system meets all technical requirements of the Statement of Work. Please submit: A completed ANL-70 Request for Quotation with pricing and supporting technical evidence A completed ANL-70B Representations and Certificiations Responses are due no later than 5:00 p.m. CDT on May 26, 2026.