# Inductively Coupled Etching System

Canonical: https://abierto.us/opportunities/6s176q0023100

- Solicitation number: 6-S176-Q-00231-00
- Notice type: Solicitation
- Status: Closed. Deadline was May 26, 2026 at 6:00 PM EDT
- Department: Department of Energy
- Contracting office: Argonne Natl Lab - DOE Contractor (899031)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 6640 Laboratory Equipment and Supplies
- Place of performance: Illinois
- County: Cook County (FIPS 17031). https://abierto.us/counties/cook-county-il-17031
- First posted: May 15, 2026
- Last posted: May 15, 2026
- SAM.gov: https://sam.gov/workspace/contract/opp/775591a84c8b4b11bc75c910417e54e7/view

## Description

Argonne National Laboratory is seeking quotations for an Inductively Coupled Etching System in accordance with the Statement of Work titled “Q-NEXT Inductively Coupled Etching System,” dated April 27, 2026. Award will be made on a Lowest Price, Technically Acceptable (LPTA) basis. Vendors must provide sufficient documentation to demonstrate that their proposed system meets all technical requirements of the Statement of Work. Please submit: A completed ANL-70 Request for Quotation with pricing and supporting technical evidence A completed ANL-70B Representations and Certificiations Responses are due no later than 5:00 p.m. CDT on May 26, 2026.

## Publications

- May 15, 2026: Solicitation, due May 26, 2026 at 6:00 PM EDT. Notice 312e202a209744ba827b924ce950153a. https://sam.gov/workspace/contract/opp/312e202a209744ba827b924ce950153a/view
- May 15, 2026: Solicitation, due May 26, 2026 at 6:00 PM EDT. Notice 775591a84c8b4b11bc75c910417e54e7. https://sam.gov/workspace/contract/opp/775591a84c8b4b11bc75c910417e54e7/view

## Points of contact

- Molly Hunter, mollyhunter@anl.gov, 6302523094

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/6s176q0023100.