Wafer Spinner - SEE DESCRIPTION (G5-213047.1)

Argonne National Laboratory is seeking to source: 1qty Wafer spinner that can spin photoresist and other polymers - splash ring - speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round - Bowl Cover made of safety glass - Process bowl of polypropylene (removable) - d- igital vacuum gauge - vacuum monitoring - cover open interlock - 115VAC 60/50hz 5/3 single phase - Acceleration 4000 rpm/sec - spinning time 1s-999s - 200 recipes with 40 steps each - waste bottle (0.5l in front of spinner) - Exhaust connection PG11 tube - Dimension: (wxdxh) cannot exceed (350x446x430mm) - directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line - spin chucks for : 150mm, 100mm, 3", 2" - with centering rings - piece chuck with 3mm diameter vacuum area - spare bowl - spare waste bottle - options for future dispense and edge bead upgrades Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3. NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED.

If any components are missing, your solicitation will be discarded. All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.