# Wafer Spinner - SEE DESCRIPTION (G5-213047.1)

Canonical: https://abierto.us/opportunities/5b193q0068600

- Solicitation number: 5-B193-Q-00686-00
- Notice type: Solicitation
- Status: Closed. Deadline was August 13, 2025 at 1:00 PM EDT
- Department: Department of Energy
- Contracting office: Argonne Natl Lab - DOE Contractor (899031)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 6640 Laboratory Equipment and Supplies
- Place of performance: Lemont, Illinois
- County: Cook County (FIPS 17031). https://abierto.us/counties/cook-county-il-17031
- City: Lemont. https://abierto.us/cities/lemont-il-1742795
- First posted: August 8, 2025
- Last posted: August 8, 2025
- SAM.gov: https://sam.gov/workspace/contract/opp/57e4419511004ab4bfacd45edc283f78/view

## Description

Argonne National Laboratory is seeking to source: 1qty Wafer spinner that can spin photoresist and other polymers - splash ring - speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round - Bowl Cover made of safety glass - Process bowl of polypropylene (removable) - d- igital vacuum gauge - vacuum monitoring - cover open interlock - 115VAC 60/50hz 5/3 single phase - Acceleration 4000 rpm/sec - spinning time 1s-999s - 200 recipes with 40 steps each - waste bottle (0.5l in front of spinner) - Exhaust connection PG11 tube - Dimension: (wxdxh) cannot exceed (350x446x430mm) - directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line - spin chucks for : 150mm, 100mm, 3", 2" - with centering rings - piece chuck with 3mm diameter vacuum area - spare bowl - spare waste bottle - options for future dispense and edge bead upgrades Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3. NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED.

If any components are missing, your solicitation will be discarded. All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.

## Publications

- August 8, 2025: Solicitation, due August 13, 2025 at 1:00 PM EDT. Notice 57e4419511004ab4bfacd45edc283f78. https://sam.gov/workspace/contract/opp/57e4419511004ab4bfacd45edc283f78/view

## Points of contact

- Annette Wegrzyn, awegrzyn@anl.gov, 6302522794

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/5b193q0068600.