One (1) broad beam ion polisher

The Contractor shall provide one (1) broad beam ion polisher with the following specifications:

1) Argon gun(s) used as the ion source with mass flow controller.

2) Maximum ion beam energy of six (6) kilovolt (kV) or higher 3) Minimum ion beam energy of 100 volt (V) or less 4) Timed beam on/off intervals 5) Tabletop design 6) Turbo pump for vacuum system 7) Cross-section milling capability. Maximum sample size of 20 x 12 x 7 millimeter (mm) or greater Sample X- moving range of at least seven (7) mm. Sample Y-moving range of at least three (3) mm.

Minimum stage swing angle of ±15 degrees (°) Milling rate greater than 500 micrometer/second (?m/s) (measured on Silicon) 8) Planar milling capability Maximum sample size of 50 mm diameter x 25 mm height or greater Sample moving range of zero (0) to five (5) mm or greater. Sample rotation range: maximum of ±90° or greater. Stage tilt range from 0° – 90° or greater.

9) Cryogenic cooling stage Cooling by liquid nitrogen gas (N2) Cooling temperature range: zero (0) to -100° Celsius (C) The Contractor shall deliver the product within 270 days after contract award to:

U.S. Army Research Laboratory (ARL) Shipping and Receiving 6375 Johnson Road, Building 321 Aberdeen Proving Ground, MD 21005