Precision Polisher

Announcement Type:

Special Notice Classification Code:

6695 Announcement Number:

NB305000-25-00924 Subject: Notice of Intent to Noncompetitively Acquire Targeted Precision Sample System NIST CHIPS Metrology R&D program has nondestructive defect detection metrology (NDDM) for semiconductor advanced packaging project. The NDDM project aims at developing reference defect artifacts and characterizing defective semiconductor samples to help improve X-ray computed tomography (XCT) defect detection metrology and accuracy of detection.

This is critical for improving efficiency and productivity of semiconductor failure analysis process. The defect artifacts’ engineered defects and defective semiconductor samples’ defects need to be characterized to provide ground truth information which will be compared to XCT-based defect detection results. In order to characterize the ground truth defect information, the defect artifacts and defective semiconductor materials need to be destructively measured using methods such as precision mechanical polishing.

Cross-sectioning or delayering processes will be implemented on the samples, which require accurate sample alignments through micrometer adjustments and precision polishing through digital dial indicators. The cross sections or the delayered planes are measured using an optical microscope optimized for the polisher sample holders and polishing process. NIST requires a precision mechanical polisher system to prepare accurate sample cross sections. This notice is not a request for a quotation.

A solicitation document will not be issued and quotations will not be requested. This acquisition is being conducted under the authority of FAR 13.106-1(b)(1)(i). The North American Industry Classification System (NAICS) code for this acquisition is 334516, Analytical Laboratory Instrument Manufacturing. NIST requires a precision mechanical polisher system to prepare accurate sample cross sections.

The precision polisher shall be equipped with a precision platen with size of at least 8 in in diameter, which include two (2) precision platens and one (1) magnetic platen for magnetic system discs. The robotic arm item must be stable to physical contact and temperature variation. The robotic arm will be used for the automation of a traceable permittivity standard. This requirement supports the NIST CHIPS program on improving both efficiency and productivity of semiconductor failure analysis process.

After thorough evaluation, it has been determined that the Targeted Precision Sample System from manufacturer, Allied High Tech Products, Inc., is essential for several reasons:

Technical: The Allied High Tech Multiprep 8" system is the only system that fully meets the technical requirements. Larger load reduction capability allows NIST to remove finer amounts of materials in a controlled manner, which is essential for the for serial sectioning process. The magnetic platen allows NIST to have even pressure distribution, higher stability/precision, and quick and easy setup for polishing process which are all critical for the process.

Compatibility: NIST has developed sample preparation workflow and recipes based on an existing Allied High Tech Multiprep system, including developing a cross sectioning process using an existing multiprep system. A cross-section preparation can take several hours, and it would be significant amount of time, resources and additional money to redevelop the process for a new system.

It is also imperative to have consistency across the previous sample preparation process to maintain consistent sample preparation, especially when generating consistent quality imaging data that NIST publishes. NIST conducted market research in November 2024 by internet searches, discussions with sources, and a sources sought posting. Sources sought NIST-FY25-CHIPS-0069 was posted from February 28, 2025, March 7, 2025 with no responses.

The results of that market research revealed that only Allied High Tech Products, Inc. 16207 Carmenita Rd., Cerritos, California 90703-2212, UEI: EN94BAJ13GL5 appears to be capable of meeting NIST’s requirements.

However, any sources that believe they are capable of meeting NIST’s minimum requirements are encouraged to respond to this notice by the response date to provide the following information at a minimum: Company Unique Entity Identifier number in http://sam.gov; details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements; whether your company is an authorized reseller of the product or service being cited and evidence of such authorization; and any other information that can help NIST determine whether this requirement may be competitively satisfied.