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Sources sought

Interference Lithography Stage System

BZ-2025-11

Department of Energy, Berkeley Natl Lab - DOE Contractor. Analytical Laboratory Instrument Manufacturing.

39 open like this View on SAM.gov Markdown

Response deadline

August 25, 2025 at 6:00 PM EDT

Closed 433 days ago. Posted August 15, 2025. Scheduled to archive August 26, 2025.

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This one closed in 2025

39 like it are open now in analytical laboratory instrument manufacturing

All 39 open in analytical laboratory instrument manufacturing

Description

As published on SAM.gov.

Lawrence Berkeley National Laboratory is conducting market research to identify sources that possess the capabilities and experience necessary to deliver an Interference Lithography Stage System for the Center for X-Ray Optics. The stage system consists of two separate stage assemblies: one will carry standard size silicon wafers, the other will carry a tray of optical gratings.

Light will pass through the gratings from above and reach the wafer, which will require the grating mount to be offset from the stage body or to have an open frame stage assembly. The stage system will be enclosed in a vacuum chamber with an operating pressure of 1E-7 Torr. The stages must be built to withstand the vacuum environment with low particle generation and also have minimal outgassing when the chamber is at operating pressure. Please see the attached RFI documents for preliminary specifications and submission instructions.

Publications

Every notice SAM.gov issued under this solicitation number, oldest first. Each is a separate record on SAM.

  1. August 15, 2025

    Sources sought

    Due August 25, 2025 at 6:00 PM EDT. SAM.gov, notice a7ea73a0a0714380b06c6f94f4f95f93

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