Sputtering Tool System

PLEASE NOTE: AN ADDENDUM HAS BEEN INCORPORATED INTO THIS SOLICITATION AS OF 9/23/2025. PLEASE INCLUDE A SIGNED COPY OF THE ADDENDUM WITH THE PROPOSAL. Argonne National Laboratory is seeking a provider of a sputtering system handling multiple substrates sizes from 150mm to wafer pieces for support of our users and staff scientists. Please review first the Instructions for Offerors, and then the ANL-70 Request for Quotation for the required documentation.

The following documents must be returned and fully executed by a person authorized to legally bind the Offeror. - Reps and Certs – ANL-70B form - Request for Quotation, ANL-70 form - Proposal/Addendums and Acknowledgment Documentation - Evidence to support clear adherence or exception to each item in the Statement of Work Any questions should be directed via email to the Contracting Officer. All submissions will first be reviewed by technical acceptability, country of origin, and then final price.

Please send all submissions to Molly Hunter at mollyhunter@anl.gov no later than 09/26/2023 at 5:00CDT. We appreciate your speed and effort in providing the Laboratory a solution.