# Turbo Pumping System for EUV Scatterometry Chamber

Canonical: https://abierto.us/opportunities/nistss24chips0014

- Solicitation number: NIST-SS24-CHIPS-0014
- Notice type: Sources sought
- Status: Closed. Deadline was March 1, 2024 at 11:00 AM EST
- Department: Department of Commerce
- Agency: National Institute of Standards and Technology
- Contracting office: Department of Commerce NIST (1333ND)
- NAICS: 334516 Analytical Laboratory Instrument Manufacturing
- Product or service code: 6640 Laboratory Equipment and Supplies
- Place of performance: Gaithersburg, Maryland
- County: Montgomery County (FIPS 24031). https://abierto.us/counties/montgomery-county-md-24031
- City: Gaithersburg. https://abierto.us/cities/gaithersburg-md-2431175
- First posted: February 15, 2024
- Last posted: February 15, 2024
- SAM.gov: https://sam.gov/workspace/contract/opp/617fce5ceee8438c887fbd0f55b6a11a/view

## Description

Per the attachments

## Publications

- February 15, 2024: Sources sought, due March 1, 2024 at 11:00 AM EST. Notice 617fce5ceee8438c887fbd0f55b6a11a. https://sam.gov/workspace/contract/opp/617fce5ceee8438c887fbd0f55b6a11a/view

## Points of contact

- Elizabeth Timberlake, elizabeth.timberlake@nist.gov, 3019756002
- Tracy Retterer, Tracy.retterer@nist.gov

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/nistss24chips0014.