{"canonical":"https://abierto.us/opportunities/nb6800002601364","key":"NB6800002601364","url":"https://abierto.us/opportunities/nb6800002601364","title":"NOTICE OF INTENT-BMF HF Vapor Etcher","solicitation_number":"NB680000-26-01364","notice_type":"s","open":false,"response_deadline":"2026-05-08T20:00:00Z","first_posted":"2026-04-29","last_posted":"2026-05-08","department":"COMMERCE, DEPARTMENT OF","subagency":"NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY","office":"DEPT OF COMMERCE NIST","naics":"334516","psc":"6640","set_aside":null,"place_state":"CO","place_county":"08013","place_county_name":"Boulder County","place_city":"0807850","place_city_name":"Boulder","winner":"IDONUS SARL","award_amount":null,"publications":[{"notice_id":"32a11a73b64f4eaf9bf6b20ea73549eb","title":"BMF HF Vapor Etcher","solicitation_number":"NB680000-26-01364","notice_type":"r","base_type":"r","posted":"2026-04-29","posted_at":null,"due_at":"2026-05-08T20:00:00Z","due_date":"2026-05-08","cancelled":null,"archived":null,"archive_date":"2026-05-23","award_number":null,"awardee_name":null,"amount":null,"link_sam":"https://sam.gov/workspace/contract/opp/32a11a73b64f4eaf9bf6b20ea73549eb/view","enriched":false,"history":[]},{"notice_id":"dc3087c418dc4644b02026b7f4675ee3","title":"NOTICE OF INTENT-BMF HF Vapor Etcher","solicitation_number":"NB680000-26-01364","notice_type":"s","base_type":"r","posted":"2026-05-08","posted_at":null,"due_at":"2026-05-18T23:00:00Z","due_date":"2026-05-18","cancelled":null,"archived":null,"archive_date":"2026-06-02","award_number":null,"awardee_name":null,"amount":null,"link_sam":"https://sam.gov/workspace/contract/opp/dc3087c418dc4644b02026b7f4675ee3/view","enriched":false,"history":[]}],"latest_notice_id":"dc3087c418dc4644b02026b7f4675ee3","first_type":"r","notices":[{"dates":{"posted":"2026-04-29","response_deadline":{"raw":"2026-05-08T14:00:00-06:00","utc":"2026-05-08T20:00:00Z","date":"2026-05-08","time":"14:00:00","utc_offset_seconds":-21600}},"links":{"sam":"https://sam.gov/workspace/contract/opp/32a11a73b64f4eaf9bf6b20ea73549eb/view"},"naics":{"codes":["334516"],"primary":"334516"},"title":"BMF HF Vapor Etcher","agency":{"office":{"code":"1333ND","name":"DEPT OF COMMERCE NIST"},"subtier":{"code":"1341","name":"NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY"},"department":{"code":"013","name":"COMMERCE, DEPARTMENT OF"},"office_address":{"zip":"20899","city":"GAITHERSBURG","state":"MD","country":"USA"},"organization_type":"OFFICE"},"status":{"active":false,"archive_date":"2026-05-23","archive_type":"auto15"},"contacts":[{"name":"Angela Hitt","role":"primary","email":"angela.hitt@nist.gov","phone":"3034977305"}],"base_type":{"code":"r","label":"Sources Sought"},"notice_id":"32a11a73b64f4eaf9bf6b20ea73549eb","provenance":{"extract":{"url":"https://s3.amazonaws.com/falextracts/Contract%20Opportunities/Archived%20Data/FY2026_archived_opportunities.csv","etag":"\"d9374b90a938e9923d910594731b7b57-106\"","fetched_at":"2026-09-16T16:22:53.920682Z","row_sha256":"b7407bab0fec850ce49b06f1121ddb8d08b522e4495a5c44a474c47a3db4552b","last_modified":"2026-09-13T14:50:39Z"},"updated_at":"2026-09-16T16:22:53.920682Z","first_seen_at":"2026-09-16T16:22:53.920682Z"},"description":{"text":"THIS SOURCES SOUGHT IS NOT A REQUEST FOR QUOTATION. It is a market research tool being used to determine potential and eligible business firms that can provide the product described herein prior todetermining the method of acquisition. The National Institute of Standards & Technology (NIST) seeks information on vendors that can provide a BMF HF Vapor Etcher per the specifications attached herein. This announcement is not a Request for Proposals or Quotes (RFP/RFQ) and does not commit the Government to award a contract now or in the future. The information contained in this notice is DRAFT only and, as such, is subject to change prior to the issuance of a solicitation. No solicitation is available currently. Additionally, the Government is not obligated to and will not pay for any information received from potential sources because of this Sources Sought announcement. The results of this Sources Sought will be utilized to determine if any Small Business Setaside opportunities exist. All Small Business Set-aside categories will be considered. In addition, this market research tool is being used to identify potential and eligible firms, of all sizes, who manufacture the BMF HF Vapor Etcher in the U.S. prior to determining the method of acquisition and issuance of a solicitation. PLEASE INDICATE WHAT COUNTRY MANUFACTURES THIS PRODUCT. After the results of this market research are obtained and analyzed, NIST may conduct a competitive or non-competitive procurement on the System for Award Management (sam.gov) and subsequently award a contract. If at least two qualified small businesses are identified during this market research stage that can fulfill the requirement, in accordance with the Specifications, then this acquisition shall be solicited as a small business set aside, however, NIST is seeking responses from ALL responsible sources, including large and small businesses. Responses should include the country where the product is manufactured. This requirement is assigned a NAICS code of 334516, Analytical Laboratory Instrument Manufacturing, with a small business size standard of 1,000 employees. Interested business organizations that believe they can meet the requirements should submit electronic copies of their capability statement. Please limit responses to four (4) pages or less. Responses should include the following information: 1. Name of the company that will provide the product(s). 2. Name of the company that will manufacture the product. 3. County of origin or manufacture of the product. 4. Spec/data sheets and examples of products that meet the specifications that demonstrate experience in meeting the requirements of this procurement. 5. Typical lead time to deliver the product after receipt of order 6. Any other relevant information that is not listed above that the Government should consider in developing its minimum specifications and finalizing its market research. (Company sales brochures or marketing packages will not be considered.) Any proprietary information should be so marked. The written capability statement should be received by the Contracting Officer, Angela Hitt, via email at angela.hitt@nist.gov no later than the date and time posted in this notice. No quotes will be accepted at this time and will not be considered. REQUIREMENTS OVERVIEW: See the attached Requirements and Specifications document","origin":"extract"},"notice_type":{"code":"r","label":"Sources Sought"},"schema_version":1,"solicitation_number":"NB680000-26-01364","place_of_performance":{"zip":"80305","city":{"name":"Boulder"},"state":{"code":"CO"},"country":{"code":"USA"}},"product_service_code":"6640"},{"dates":{"posted":"2026-05-08","response_deadline":{"raw":"2026-05-18T17:00:00-06:00","utc":"2026-05-18T23:00:00Z","date":"2026-05-18","time":"17:00:00","utc_offset_seconds":-21600}},"links":{"sam":"https://sam.gov/workspace/contract/opp/dc3087c418dc4644b02026b7f4675ee3/view"},"naics":{"codes":["334516"],"primary":"334516"},"title":"NOTICE OF INTENT-BMF HF Vapor Etcher","agency":{"office":{"code":"1333ND","name":"DEPT OF COMMERCE NIST"},"subtier":{"code":"1341","name":"NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY"},"department":{"code":"013","name":"COMMERCE, DEPARTMENT OF"},"office_address":{"zip":"20899","city":"GAITHERSBURG","state":"MD","country":"USA"},"organization_type":"OFFICE"},"status":{"active":false,"archive_date":"2026-06-02","archive_type":"auto15"},"contacts":[{"name":"Angela Hitt","role":"primary","email":"angela.hitt@nist.gov","phone":"3034977305"}],"base_type":{"code":"r","label":"Sources Sought"},"notice_id":"dc3087c418dc4644b02026b7f4675ee3","provenance":{"extract":{"url":"https://s3.amazonaws.com/falextracts/Contract%20Opportunities/Archived%20Data/FY2026_archived_opportunities.csv","etag":"\"d9374b90a938e9923d910594731b7b57-106\"","fetched_at":"2026-09-16T16:22:53.920682Z","row_sha256":"1cee9ac0a4d06354fa5b0810c19668038db3c72ab3a16cb942e5ee23bddf7340","last_modified":"2026-09-13T14:50:39Z"},"updated_at":"2026-09-16T16:22:53.920682Z","first_seen_at":"2026-09-16T16:22:53.920682Z"},"description":{"text":"The National Institute of Standards and Technology (NIST) Acquisition Management Division intends to negotiate with Idonus Sarl (Cage: SCH63), located in Switzerland on a sole source basis under the authority of FAR Subpart FAR RFO 12.102(a) for a BMF HF Vapor Etcher, Statutory authority for sole source is 41 U.S.C. 3304(a)(1), Only one responsible source. The statute is being implemented using simplified acquisition procedures under the authority of 41 U.S.C. 1901. The sole source determination is based on the Government’s need by the Boulder Microfabrication Facility (BMF) for performing various etching processes in the Precision Measurement Laboratory located at National Institute of Standards and Technology’s (NIST) Boulder campus. The BMF currently has a vapor etching system that is used to remove silicon dioxide films from substrates. The current system can only accept substrates with a maximum size of wafers with a lateral dimension of SEMI spec 100 mm wafers. The BMF also processes wafers with a lateral dimension of SEMI spec 150 mm wafers, and some of the new fabrication processes require HF vapor etching. Therefore, the BMF requires a new HF vapor etcher with all of the existing capabilities as the existing vapor etcher, but with the ability to accept substrates up to wafers with a lateral dimension of SEMI spec 150 mm wafers. The NAICS Code is 334516 – Analytical Laboratory Manufacturing, with a Size Standard of 1,000 employees. NIST anticipates negotiating and awarding a firm-fixed-price purchase order to Idonus Sarl for this requirement. Interested parties that can demonstrate they could satisfy the requirements listed above for NIST must clearly and unambiguously identify their capability to do so in writing on or before the response date for this notice. This notice of intent is not a solicitation. Information submitted in response to this notice will be used solely to determine whether competitive procedures could be used for this acquisition. If competitive procedures are not used it is estimated that an award will be issued by June 2026. Any questions regarding this notice must be submitted in writing via email to angela.hitt@nist.gov. All responses to this notice of intent must be submitted to angela.hitt@nist.gov no later than 5/19/2025 at 5:00 p.m. MT. JUSTIFICATION FOR OTHER THAN FULL AN OPEN COMPETITION: HF vapor etching is a standard wafer processing technique in the semiconductor industry. There are machines that range in size and ability from R&D to full foundry production and many companies offer a system. Common systems use either HF liquid or gas. The most important issue for an HF vapor is safety as HF is an extremely toxic chemical where exposures of 50 mL can be fatal. Due to the danger of HF, the Government needs to stay with the liquid etchers for safety reasons. No other vendor can meet these technical requirements and meet the safety concerns. Without this procurement, critical NIST research activities involving etching processes would be forced to stop.","origin":"extract"},"notice_type":{"code":"s","label":"Special Notice"},"schema_version":1,"solicitation_number":"NB680000-26-01364","place_of_performance":{"zip":"80305","city":{"name":"Boulder"},"state":{"code":"CO"},"country":{"code":"USA"}},"product_service_code":"6640"}],"due_at":"2026-05-08T20:00:00Z","due_date":"2026-05-08","closes_at":"2026-05-08T20:00:00Z","awardable":false,"dept_key":"d-013","dept_name":"COMMERCE, DEPARTMENT OF","sub_key":"s-1341","sub_name":"NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY","office_key":"o-1333ND","office_name":"DEPT OF COMMERCE NIST","state":"CO","county":"08013","county_name":"Boulder County","city":"0807850","city_name":"Boulder","country":"USA","winner_key":"EN3NGTK8DPZ5","amount":null,"linked_awards":2,"cancelled":false,"archived":false,"updated_at":"2026-09-17T06:28:38.602097Z","principal_notice_id":"dc3087c418dc4644b02026b7f4675ee3","description":{"text":"The National Institute of Standards and Technology (NIST) Acquisition Management Division intends to negotiate with Idonus Sarl (Cage: SCH63), located in Switzerland on a sole source basis under the authority of FAR Subpart FAR RFO 12.102(a) for a BMF HF Vapor Etcher, Statutory authority for sole source is 41 U.S.C. 3304(a)(1), Only one responsible source. The statute is being implemented using simplified acquisition procedures under the authority of 41 U.S.C. 1901. The sole source determination is based on the Government’s need by the Boulder Microfabrication Facility (BMF) for performing various etching processes in the Precision Measurement Laboratory located at National Institute of Standards and Technology’s (NIST) Boulder campus. The BMF currently has a vapor etching system that is used to remove silicon dioxide films from substrates. The current system can only accept substrates with a maximum size of wafers with a lateral dimension of SEMI spec 100 mm wafers. The BMF also processes wafers with a lateral dimension of SEMI spec 150 mm wafers, and some of the new fabrication processes require HF vapor etching. Therefore, the BMF requires a new HF vapor etcher with all of the existing capabilities as the existing vapor etcher, but with the ability to accept substrates up to wafers with a lateral dimension of SEMI spec 150 mm wafers. The NAICS Code is 334516 – Analytical Laboratory Manufacturing, with a Size Standard of 1,000 employees. NIST anticipates negotiating and awarding a firm-fixed-price purchase order to Idonus Sarl for this requirement. Interested parties that can demonstrate they could satisfy the requirements listed above for NIST must clearly and unambiguously identify their capability to do so in writing on or before the response date for this notice. This notice of intent is not a solicitation. Information submitted in response to this notice will be used solely to determine whether competitive procedures could be used for this acquisition. If competitive procedures are not used it is estimated that an award will be issued by June 2026. Any questions regarding this notice must be submitted in writing via email to angela.hitt@nist.gov. All responses to this notice of intent must be submitted to angela.hitt@nist.gov no later than 5/19/2025 at 5:00 p.m. MT. JUSTIFICATION FOR OTHER THAN FULL AN OPEN COMPETITION: HF vapor etching is a standard wafer processing technique in the semiconductor industry. There are machines that range in size and ability from R&D to full foundry production and many companies offer a system. Common systems use either HF liquid or gas. The most important issue for an HF vapor is safety as HF is an extremely toxic chemical where exposures of 50 mL can be fatal. Due to the danger of HF, the Government needs to stay with the liquid etchers for safety reasons. No other vendor can meet these technical requirements and meet the safety concerns. Without this procurement, critical NIST research activities involving etching processes would be forced to stop.","html":null,"origin":"extract"},"contacts":[{"name":"Angela Hitt","role":"primary","email":"angela.hitt@nist.gov","phone":"3034977305"}],"place_of_performance":{"zip":"80305","city":{"name":"Boulder"},"state":{"code":"CO"},"country":{"code":"USA"}},"office_address":{"zip":"20899","city":"GAITHERSBURG","state":"MD","country":"USA"},"naics_codes":["334516"],"award":null,"attachments":[],"awards":[{"award_key":"CONT_AWD_1333ND26PNB680454_1341_-NONE-_-NONE-","permalink":"https://www.usaspending.gov/award/CONT_AWD_1333ND26PNB680454_1341_-NONE-_-NONE-/","piid":"1333ND26PNB680454","parent_piid":null,"award_type":"PURCHASE ORDER","vendor_key":"EN3NGTK8DPZ5","recipient_name":"IDONUS SARL","recipient_uei":"EN3NGTK8DPZ5","recipient_cage":"SCH63","recipient_city":"HAUTERIVE","recipient_state":null,"sub_name":"National Institute of Standards and Technology","office_name":"DEPT OF 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