# Notice of Intent to Noncompetitively CHIPS R&D: Microsystems Wafer Fab (1) + Permittivity Coupons

Canonical: https://abierto.us/opportunities/nb3050002402176

- Solicitation number: NB305000-24-02176
- Notice type: Special notice
- Status: Closed. Deadline was August 26, 2024 at 11:00 AM EDT
- Department: Department of Commerce
- Agency: National Institute of Standards and Technology
- Contracting office: Department of Commerce NIST (1333ND)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 6640 Laboratory Equipment and Supplies
- Place of performance: Boulder, Colorado
- County: Boulder County (FIPS 08013). https://abierto.us/counties/boulder-county-co-08013
- City: Boulder. https://abierto.us/cities/boulder-co-0807850
- First posted: August 16, 2024
- Last posted: August 16, 2024
- SAM.gov: https://sam.gov/workspace/contract/opp/0aefbf0ab3cc496385903b57fa550e67/view

## Description

**Background:** NIST requires 0.1mm HPFS coupons 35x45mm; 0.2mm High purity fused silica (HPFS) coupons 35x45mm; 0.15mm HPFS coupons 35x45mm; 0.15mm HPFS coupons 90x90mm, 35x45mm, and 49mm dia; 0.15mm HPFS prototyping wafers; 0.175mm HPFS Phase Calibration Wafers; 0.15mm HPFS S-parameters and power wafers. The coupons will be used for the development of a traceable permittivity standard, to develop traceability paths to support the development of the SRM, and on-wafer traceability for S-parameters power and phase.

The objective of the requirement is to enable traceable measurements of complex permittivity and on-wafer traceability for S-parameters, power, and phase. This requirement supports the NIST CHIPS program to develop and disseminate NIST best practices and algorithms for permittivity measurements and deliver a new standard for complex permittivity up to 80 GHz. This notice is not a request for a quotation. A solicitation document will not be issued and quotations will not be requested.

This acquisition is being conducted under the authority of FAR 13.106-1(b) via FAR 13.501. The North American Industry Classification System (NAICS) code for this acquisition is 333242 Semiconductor Machinery Manufacturing. In order to meet the project requirements the following requirements the system must include viaffirm process to fabricate the coupons with the desired tolerances of 200 nm Total thickness variation (TTV) across an 8" wafer which is proprietary to Mosaic Microsystems.

This TTV is necessary to maintain the uncertainties in the complex permittivity below 0.1%. The proprietary nature of this procurement and that the requirement is for a custom built product. NIST conducted market research from May 2024 through August 2024 and included interet searches, reviews of company websites, and contact with potential vendors. The results of that market research revealed that only Mosaic Microsystems LLC; 500 Lee Road, Rochester NY, 1406-4261;

**UEI:** jpldlbveeup2 appears to be capable of meeting NIST’s requirements. However, any sources that believe they are capable of meeting NIST’s minimum requirements are encouraged to respond to this notice by the response date to provide the following information at a minimum: Company Unique Entity Identifier number in https://sam.gov; details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements; whether your company is an authorized reseller of the product or service being cited and evidence of such authorization; and any other information that can help NIST determine whether this requirement may be competitively satisfied.=

## Publications

- August 16, 2024: Special notice, due August 26, 2024 at 11:00 AM EDT. Notice 0aefbf0ab3cc496385903b57fa550e67. https://sam.gov/workspace/contract/opp/0aefbf0ab3cc496385903b57fa550e67/view

## Points of contact

- Tracy Retterer, Tracy.retterer@nist.gov
- Forest Crumpler, forest.crumpler@nist.gov

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/nb3050002402176.