# Photolithography Exposure System

Canonical: https://abierto.us/opportunities/ht942525qe028

- Solicitation number: HT942525QE028
- Notice type: Award notice (first published as combined synopsis and solicitation)
- Status: Awarded to Heidelberg Instruments Inc. for $160,700.00
- Department: Department of Defense
- Agency: Defense Health Agency (Dha)
- Contracting office: Army Med Res Acq Activity (HT9425)
- NAICS: 333242 Semiconductor Machinery Manufacturing
- Product or service code: 3670 Specialized Semiconductor, Microcircuit, and Printed Circuit Board Manufacturing Machinery
- Set-aside: Total small business set-aside
- Place of performance: Gunpowder, Maryland
- County: Harford County (FIPS 24025). https://abierto.us/counties/harford-county-md-24025
- First posted: August 11, 2025
- Last posted: September 19, 2025
- SAM.gov: https://sam.gov/workspace/contract/opp/fbe3a34eea1e45ae9a2d1f59a7c4c58f/view

## Description

The U.S. Army Medical Research Institute of Chemical Defense (USAMICD) requires a photolithography exposure system which could be a mask aligner or a direct laser writer (also known as a “maskless” aligner). It shall have a UV light source that passes light through an inserted photomask onto a substrate coated in photoresist. The system shall be able to align this projected pattern precisely with the substrate being exposed. The UV light wavelength shall be compatible with SU-8 photoresist (365nm).

Operating parameters shall be digitally controlled with a programmable logic controller system or included computer. Created patterns shall be repeatable with a resolution of 2 microns or less. The system shall be able to expose an area up to and including that of a standard 6” wafer. It shall be capable of both soft and hard contact exposure. The system will be used for prototyping electrode designs with precise features. It should not require a clean room to operate.

## Award on USAspending

- Recipient: Heidelberg Instruments Inc. (UEI UB7PM2A1F9A1)
- Contract: HT942525PE042, purchase order
- Obligated: $133,100.00
- Competition: Competed Under SAP, 2 offers received
- Link: award number HT942525PE042 equals the contract number; same awarding office HT9425 (high confidence)
- Record: https://www.usaspending.gov/award/CONT_AWD_HT942525PE042_9700_-NONE-_-NONE-/


## Publications

- August 11, 2025: Combined synopsis and solicitation, due August 25, 2025 at 11:00 AM EDT. Notice 13c4e21e31b34b25ba4b961388b8b70a. https://sam.gov/workspace/contract/opp/13c4e21e31b34b25ba4b961388b8b70a/view
- August 12, 2025: Combined synopsis and solicitation, due August 25, 2025 at 11:00 AM EDT. Notice df82ca3b88dc446a87f91cb4cdc44feb. https://sam.gov/workspace/contract/opp/df82ca3b88dc446a87f91cb4cdc44feb/view
- September 19, 2025: Award notice. Notice fbe3a34eea1e45ae9a2d1f59a7c4c58f. https://sam.gov/workspace/contract/opp/fbe3a34eea1e45ae9a2d1f59a7c4c58f/view

## Points of contact

- Kenneth Grenier, kenneth.e.grenier2.civ@health.mil, 3016192728
- Jesse Nisley, jesse.d.nisley.civ@health.mil, 3016197763

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Source: SAM.gov Contract Opportunities bulk extract and USAspending.gov award data. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/ht942525qe028.