# Reactive ion etching (RIE) tool

Canonical: https://abierto.us/opportunities/6mo34q0032100

- Solicitation number: 6-MO34-Q-00321-00
- Notice type: Combined synopsis and solicitation
- Status: Closed. Deadline was June 24, 2026 at 6:00 PM EDT
- Department: Department of Energy
- Contracting office: Argonne Natl Lab - DOE Contractor (899031)
- NAICS: 54171 Research and Development in the Physical, Engineering, and Life Sciences
- Product or service code: 6640 Laboratory Equipment and Supplies
- First posted: June 17, 2026
- Last posted: June 17, 2026
- SAM.gov: https://sam.gov/workspace/contract/opp/f89b1e20fcc64e5e9d51acd7651f8413/view

## Description

Reactive ion etching (RIE) tool

## Publications

- June 17, 2026: Combined synopsis and solicitation, due June 24, 2026 at 6:00 PM EDT. Notice f89b1e20fcc64e5e9d51acd7651f8413. https://sam.gov/workspace/contract/opp/f89b1e20fcc64e5e9d51acd7651f8413/view

## Points of contact

- Michael Oprondek, moprondek@anl.gov, 6302527069

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Source: SAM.gov Contract Opportunities bulk extract. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/6mo34q0032100.