# CHIPS R&D: PHOTORESIST ATOMIC FORCE MICROSCOPE (AFM)

Canonical: https://abierto.us/opportunities/1333nd24qnb030291

- Solicitation number: 1333ND24QNB030291
- Notice type: Award notice (first published as combined synopsis and solicitation)
- Status: Awarded to Oxford Instruments Asylum Research, Inc. for $703,897.00
- Department: Department of Commerce
- Agency: National Institute of Standards and Technology
- Contracting office: Department of Commerce NIST (1333ND)
- NAICS: 334516 Analytical Laboratory Instrument Manufacturing
- Product or service code: 6640 Laboratory Equipment and Supplies
- Place of performance: Gaithersburg, Maryland
- County: Montgomery County (FIPS 24031). https://abierto.us/counties/montgomery-county-md-24031
- City: Gaithersburg. https://abierto.us/cities/gaithersburg-md-2431175
- First posted: May 30, 2024
- Last posted: August 29, 2024
- SAM.gov: https://sam.gov/workspace/contract/opp/b2020919b614488e85e494c8afa64443/view

## Description

The CHIPS Metrology Program at NIST advances metrology for accelerating R&D and for developing breakthroughs that support the development of the next-generation microelectronics and ensure the competitiveness and leadership of the United States. The Microsystems and Nanotechnology Division develops micro-/nano-fabrication technologies, devices and novel measurement methods enabled by integrated microsystems.

The National Institute of Standards and Technology (NIST) CHIPS metrology program has a requirement for a customized fluid immersion atomic force microscope (AFM) to develop advanced in-situ measurement methods of physical-chemical processes at the solid-liquid interfaces with relevance to semiconductor manufacturing. The measurement goal is to measure rapid changes in surface topography in response to the introduction of a liquid chemical reagent.

In addition to using conventional cantilever probes, the AFM will be adapted to use custom chip-scale optomechanical probes developed at NIST to achieve high bandwidth, combined with high deflection sensitivity and low perturbation during fluid exchange. A system upgradeable to video-rate imaging is required. Please see the attachments for the full notice details...

## Award on USAspending

- Recipient: Oxford Instruments Asylum Research, Inc. (UEI Q365CKN56793)
- Contract: 1333ND24PNB030407, purchase order
- Obligated: $703,897.00
- Competition: Competed Under SAP, 3 offers received
- Link: award number 1333ND24PNB030407 equals the contract number; same awarding office 1333ND (high confidence)
- Record: https://www.usaspending.gov/award/CONT_AWD_1333ND24PNB030407_1341_-NONE-_-NONE-/


## Publications

- May 30, 2024: Combined synopsis and solicitation, due June 14, 2024 at 12:00 PM EDT. Notice 48a1f74156ac486d9485d0c27e7bedea. https://sam.gov/workspace/contract/opp/48a1f74156ac486d9485d0c27e7bedea/view
- August 29, 2024: Award notice. Notice b2020919b614488e85e494c8afa64443. https://sam.gov/workspace/contract/opp/b2020919b614488e85e494c8afa64443/view

## Points of contact

- Joni L. Laster, joni.laster@nist.gov
- Forest Crumpler, forest.crumpler@nist.gov

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Source: SAM.gov Contract Opportunities bulk extract and USAspending.gov award data. Confirm deadlines on SAM.gov before responding. Cite https://abierto.us/opportunities/1333nd24qnb030291.